WorldCat Identities

Pomeroy, James M. (James Morgarum) 1836-1887

Works: 17 works in 54 publications in 1 language and 1,017 library holdings
Genres: Constitution  Records and correspondence  Military history  History  Trials, litigation, etc 
Roles: Editor, Author
Publication Timeline
Most widely held works by James M Pomeroy
Debates and proceedings of the convention which assembled at Little Rock, January 7th, 1868 by Arkansas( Book )

6 editions published between 1868 and 1981 in English and held by 99 WorldCat member libraries worldwide

The Arkansas justice : a treatise on the powers and duties of justices of the peace, embraced in their civil and criminal jurisdiction in the state of Arkansas by J. S Duffie( Book )

8 editions published between 1888 and 1900 in English and held by 91 WorldCat member libraries worldwide

Debates and proceedings of the Convention which assembled at Little Rock, January 7th, 1868 : to form a constitution for the State of Arkansas by Arkansas( Book )

10 editions published between 1868 and 1996 in English and held by 16 WorldCat member libraries worldwide

Teeth and modern life by James M Pomeroy( Book )

2 editions published in 1937 in English and held by 8 WorldCat member libraries worldwide

James M. Pomeroy letters by James M Pomeroy( )

in English and held by 2 WorldCat member libraries worldwide

Two letters (17 and 20 Dec. 1877) from James M. Pomeroy to Brig. Gen. Jacob P. Carnahan
Arkansas State Militia orders by Arkansas( )

in English and held by 2 WorldCat member libraries worldwide

Special, general, and circular orders. Persons represented include Maj. General R.C. Newton and James M. Pomeroy
Trial of hon. john m(c)clure chief justice of the supreme court of the state by James M Pomeroy( Book )

1 edition published in 2012 in English and held by 1 WorldCat member library worldwide

Chronicles of the Class of 1856, Wesleyan University, etc. [Edited by J.M.P., i.e. J.M. Pomeroy.] by Connecticut) Wesleyan University (MIDDLETOWN( Book )

1 edition published in 1857 in English and held by 1 WorldCat member library worldwide

Potential energy sputtering of EUVL materials( )

1 edition published in 2004 in English and held by 0 WorldCat member libraries worldwide

Of the many candidates employed for understanding the erosion of critical Extreme Ultraviolet Lithography (EUVL) components, potential energy damage remains relatively uninvestigated. Unlike the familiar kinetic energy sputtering, which is a consequence of the momentum transferred by an ion to atoms in the target, potential energy sputtering occurs when an ion rapidly collects charge from the target as it neutralizes. Since the neutralization energy of a singly charged ion is typically on the order of 10 eV, potential energy effects are generally neglected for low charge state ions, and hence the bulk of the sputtering literature. As an ion's charge state is increased, the potential energy (PE) increases rapidly, e.g. PE(Xe{sup 1+})= 11 eV, PE(Xe{sup 10+}) = 810 eV, PE(Xe{sup 20+}) = 4.6 keV, etc. By comparison, the binding energy of a single atom on a surface is typically about 5 eV, so even relatively inefficient energy transfer mechanisms can lead to large quantities of material being removed, e.g. 25% efficiency for Xe{sup 10+} corresponds to {approx} 40 atoms/ion. By comparison, singly charged xenon ions with {approx} 20 keV of kinetic energy sputter only about 5 atoms/ion at normal incidence, and less than 1 atom/ion at typical EUV source energies. EUV light sources are optimized for producing approximately 10{sup 16} xenon ions per shot with an average charge state of q=10 in the core plasma. At operational rates of {approx}10 kHz, the number of ions produced per second becomes a whopping 10{sup 20}. Even if only one in a billion ions reaches the collector, erosion rates could reach {approx}10{sup 12} atoms per second, severely reducing the collector lifetime (for an average yield of 10 atoms/ion). In addition, efforts to reduce contamination effects may contribute to reduced neutralization and even larger potential energy damages rates (discussed further below). In order to provide accurate estimates for collector lifetimes and to develop mitigation schemes, NIST is working to understand and quantify potential energy damage mechanisms on materials relevant to EUVL. Accurate potential energy damage rates can then be used for projecting component lifetimes as source plasma conditions are modified and characterized. This chapter will serve to provide an introduction and some background to the physics of highly charged ions and some of the relevant experimental work in the literature. This chapter will first provide a brief background and an overview of the interaction of highly charged ions (HCIs) with solids as it is currently understood. Secondly, it will present current data from screen test measurements performed to isolate and evaluate the effects of potential energy damage on critical EUVL materials. We will then speculate on the implications of work to date and the outlook for EUVL development and, finally, summarize
moreShow More Titles
fewerShow Fewer Titles
Audience Level
Audience Level
  Kids General Special  
Audience level: 0.63 (from 0.38 for Debates an ... to 1.00 for Debates an ...)

Alternative Names
Pomeroy, J. M. 1836-1887

Pomeroy, J. M. (James Morgarum), 1836-1887

Pomeroy, Jas. M. 1836-1887

Pomeroy, Jas. M. (James Morgarum), 1836-1887

English (54)