WorldCat Identities

Camon, Henri

Overview
Works: 18 works in 28 publications in 2 languages and 37 library holdings
Roles: Thesis advisor, Author, Opponent, Other
Publication Timeline
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Most widely held works by Henri Camon
Lithographie submicronique par faisceau d'électrons à haute tension (100 KeV) by Henri Camon( Book )

4 editions published in 1984 in French and held by 9 WorldCat member libraries worldwide

Conception et réalisation de références de tensions alternatives à base de MEMS by François Blard( Book )

2 editions published in 2011 in French and held by 2 WorldCat member libraries worldwide

Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to the electromechanical coupling in MEMS, it is possible to make secondary DC and AC voltage references with values from a few volts to several hundred volts with relative stabilities of about 10-7. These standards could constitute an alternative to current Zener references in the case of DC voltage and a first in AC metrology field. This PhD work was dedicated to the development and manufacturing of several generations of MEMS structures with variable electrical capacitance in which we exploit the pull-in phenomenon to build AC voltage references. The design of the samples based on specific architectures characterized by different modes of motion of the movable electrode is achieved through ConventorWare modeling. Both MEMS structures having vertical displacement of the movable membrane and combs-drive design for in-plane motion were considered. These structures have been fabricated with an industrial MPW (Multi Project Wafer) process technology, based on an SOI (Silicon On Insulator) surface micromachining process. However, a dedicated process technology has been developed to meet the specific requirements of our applications. AC voltage references having pull-in voltages ranging from 2 V to 100 V were developed with mechanical resonant frequencies of only a few kilohertz. This makes it possible to use the AC voltage references over a wide frequency range from a few tens of kilohertz to a few megahertz. We have also developed readout electronics specifically designed to match the MEMS characteristics and where the temperature of the samples is controlled. The voltage stability of MEMS was measured over 150 hours and the relative deviation from the mean was found less than one part in 106 at 50 kHz and 100 kHz. Results at several hundred of kHz are also very promising. The temperature dependence is ten times smaller than previously reported, which allow to use less sophisticated thermal stabilization platforms
Micromiroir rotatif à actionnement électrostatique réalisé en technologie silicium : de la conception à la caractérisation by Franck Larnaudie( Book )

2 editions published in 2000 in French and held by 2 WorldCat member libraries worldwide

Simulation de la gravure chimique anisotrope du silicium par une solution alcaline by Zakaria Moktadir( Book )

1 edition published in 1997 in French and held by 2 WorldCat member libraries worldwide

NOUS AVONS REALISE UNE MODELISATION ET UNE SIMULATION A L'ECHELLE ATOMIQUE DE LA GRAVURE CHIMIQUE ANISOTROPE DU SILICIUM. POUR CELA, NOUS AVONS MIS AU POINT DEUX MODELES ATOMIQUES. LE PREMIER FAIT L'HYPOTHESE QUE LA DESORPTION D'UN ATOME S'OPERE EN CASSANT SIMULTANEMENT TOUTES SES LIAISONS PAR EXCITATION THERMIQUE. CE MODELE NE REND PAS TOTALEMENT COMPTE DES OBSERVATIONS EXPERIMENTALES CAR LES RAPPORTS D'ANISOTROPIE <100>:<110> SONT INVERSES. CEPENDANT, LE MODELE DONNE UNE EXPLICATION FORMELLE DE L'ANISOTROPIE DE LA DISSOLUTION. LE SECOND EST FONDE SUR L'IDEE DE CASSER LIAISON PAR LIAISON EN CONSIDERANT QUE L'ENERGIE NECESSAIRE POUR EN CASSER UNE DEPEND DE SA CONFIGURATION, C'EST A DIRE LE NOMBRE D'IONS HYDROXYDES QUI L'ENTOURENT. L'ASPECT DYNAMIQUE TEMPOREL EST ASSURE DANS LES DEUX CAS PAR LA MISE EN UVRE D'UN ALGORITHME MONTE CARLO. LA SIMULATION NOUS PERMET DE CALCULER LES VITESSES D'ATTAQUE SUIVANT N'IMPORTE QUELLE DIRECTION <HKL>. ON PEUT DONC CONSTRUIRE UN DIAGRAMME COMPLET DES VITESSES D'ATTAQUE. LES RESULTATS OBTENUS SONT EN ACCORD AVEC L'EXPERIENCE. NOTRE ANALYSE CONCERNE LES ENERGIES D'ACTIVATION, LES RAPPORTS D'ANISOTROPIES ET UNE ANALYSE QUALITATIVE DE LA RUGOSITE MICROSCOPIQUE
Etude et réalisation d'une micropompe et de microvalves intégrées tout silicium by Zouhair Sbiaa( Book )

1 edition published in 1997 in French and held by 2 WorldCat member libraries worldwide

LE DOMAINE DU GENIE BIOLOGIQUE ET MEDICAL EST CONSIDERE, A TERME, COMME L'UN DES SECTEURS PRIVILEGIES D'APPLICATION DES MICROSYSTEMES. NOTRE SUJET DE THESE CONCERNE CE SECTEUR D'APPLICATION, IL CONSISTE EN LA CONCEPTION ET LA REALISATION D'UNE UNITE D'ANALYSE CHIMIQUE COMPRENANT UNE MICROPOMPE ACTIONNEE PAR UNE RESISTANCE THERMIQUE DONT LE ROLE EST DE PERMETTRE L'ACHEMINEMENT D'UN FLUIDE VERS UNE CHAMBRE MULTI-CAPTEUR D'ANALYSE PHYSICO-CHIMIQUE (PRESSION, ISFET, TEMPERATURE,). NOTRE TRAVAIL S'INTEGRE DANS LE CADRE DU PROJET EUROPEEN BARMINT (BASIC RESEARCH OF MICROSYSTEMS INTEGRATION). POUR SUPPORTER L'ACTION DE RECHERCHE, IL PREVOIT LA CONCEPTION ET LA REALISATION D'UN DEMONSTRATEUR COMPLET INTEGRANT NOTAMMENT LES COMPOSANTS CI-DESSUS. L'ORIGINALITE DU PROCEDE DE REALISATION QUE NOUS PROPOSONS EST DE FABRIQUER, SUR UN MEME SUBSTRAT DE SILICIUM POLI DOUBLE FACE, UNE MEMBRANE (MICRO-USINEE GRACE A UNE SOLUTION CHIMIQUE) ET DE DEUX MICROVALVES A SENS UNIQUE QUI CONTROLENT L'ENTREE ET LA SORTIE DU FLUIDE. CES VALVES SONT OBTENUES APRES DEPOTS LPCVD ET GRAVURES PAR PLASMA DU SILICIUM POLYCRISTALLIN. NOUS TRAITERONS EN DETAILS TOUS LES ASPECTS DE CONCEPTION THERMOPNEUMATIQUE AINSI QUE TOUTES LES ETAPES TECHNOLOGIQUES DE REALISATION DE LA MICROPOMPE ET DES MICROVALVES. NOUS NOUS INTERESSONS AUSSI AUX PROBLEMES DE COMPTABILITE DE CES TECHNOLOGIES AVEC LES TECHNIQUES VLSI. UNE MODELISATION THERMIQUE ET MECANIQUE DE LA MICROPOMPE EST PROPOSEE ET APPLIQUER A L'OPTIMISATION DU DISPOSITIF. CE TRAVAIL OUVRE DES PERSPECTIVES QUANT A LA CONCEPTION ET LA REALISATION DE FUTURS MICROSYSTEMES POUR DES APPLICATIONS SPATIALES, MEDICALES
A multilevel polymer process for direct encapsulation of fluids in microfluidic systems by Remy Bossuyt( )

1 edition published in 2011 in English and held by 2 WorldCat member libraries worldwide

Etude des propriétés spectrales et spatiales de réflecteurs et coupleurs résonants by Romain Laberdesque( Book )

2 editions published in 2016 in French and held by 2 WorldCat member libraries worldwide

The study is focused on the spectral and spatial properties of resonant grating structures. Resonant gratings in cavity are identified as structures allowing the fabrication of small-area and efficient reflectors and couplers. A model based on coupled mode theory has been developped, enabling fast modeling and design of this kind of structures. Thanks to this model we improved our understanding of the spectral and spatial properties of resonant gratings in cavity. In particular, we have established the relationship between the structure's geometry and the spectral and spatial properties of the modes which efficiently interact with the structures when used as reflectors or as couplers. The design of coupling structures with high-quality factor and controlled spatial profiles on cm-sized surfaces has been studied. Two axis of research are presented: structures composed of several cavities and structures composed by one large cavity. The later ones allow a better control of the spatial properties both in intensity and phase. We demonstrate that these structures have a high potential for holography. Design of such structures with low contrast index is also considered, particularly the design and fabrication of polymer-based waveguiding structures
Conception et modélisation d'un micro-actionneur à base d'élastomère diélectrique by Sofiane Soulimane( Book )

2 editions published in 2010 in French and held by 2 WorldCat member libraries worldwide

Polymer materials have been proposed to be good candidates for the development of new actuators. Due to their tunable mechanical and electrical properties, they can be used as electro-active devices. In this manuscript, we focus on dielectric elastomers based actuators, and word toward establishing innovative and alternative integration/miniaturization processes inspired from microelectronics and MEMS technology. Dielectric elastomer actuators are made of an elastomer dielectric layer sandwiched between two conductive electrodes. Upon voltage application attraction forces between the electrodes generates a mechanical displacement correlated with the elastomer Young modulus and permittivity. After a complete review of polymer materials as electro-active actuators, we propose to use the polydimethylesiloxane (PDMS) due to its high elasticity and its permittivity made adjustable by addition of ceramic nanoparticles. A original process for structuring PDMS layers is developed to overcomes the technological challenges encountered during the integration of such materials in a micro-actuator. In addition, several method of characterization allowed us to better understand the physicochemical mechanisms involved at different technological steps for both the material alone or mixed with Titanate of Baryum nanoparticles. We also measured the permittivity and the elasticity modulus of these materials at the end of the manufacturing process thereby verifying the concervation and the enhancement of the initial properties that set our choice. In parallel the response of our actuator is analyzed quantitatively by implementing a finite element model with the Comsol software, and by modeling the elastomer response with hyper elastic models. We show excellent correlation between the model and experimental deformations. Moreover, we determine that the thinness, hence the deformability, of the upper electrode guaranties high performances to the manufactured micro-actuator, and we conduct preliminary tests with a compliant electrode obtained with the PEDOT-PSS conductive polymer
Étude et conception de microstructures complexes pour la réalisation de systèmes optiques à destination de la correction ophtalmique by Rémy Bossuyt( Book )

2 editions published in 2012 in French and held by 2 WorldCat member libraries worldwide

In this thesis the design and implementation of a pixellised transparent structure for which diffraction and diffusion are imperceptible have been studied and the checkerboard double stacked structure was the most appropriate. A study of lithography techniques for large surfaces is proposed. The object is achieved with a sol-gel, combining an organic and an inorganic phase, which have been modified to be sensitive, of a negative-type and transparent in the visible. The resin is studied in terms of its performance under the specific characteristics of each level (alternating checkered tanks and plots). It sets the gamma of the resin and the optimum parameters of insolation. A new method for determining the gamma tailored to negative resins is proposed. The realization of the multi-level structure by photolithography and lamination has been operated. It allows the separation of different levels due to the deposition of a layer of resin. The pixels of the lower level are sealed in one operation. The dimensional characterizations of objects made during the development process were investigated by SEM and mechanical profilometer. A laser bench which calculates the diffraction of structures has been implemented. The optical characterizations performed with the Haze Gard or DHM have yielded a phase image transmission. This step shows that a compromise between the level of diffraction and diffusion level must be found for the needs of ophthalmic optics
Matériaux fonctionnels et procédés technologiques pour la réalisation de composants optiques actifs transparents by Anatole Héliot( Book )

2 editions published in 2018 in French and held by 2 WorldCat member libraries worldwide

Ces travaux de thèse sont une contribution au projet de réalisation de matrices actives photoniques dans le cadre de la confection de lunettes à réalité augmentée. Un état de l'art des dispositifs actuels nous a permis de montrer l'encombrement engendré par l'utilisation d'un projecteur situé sur la monture. Pour s'en abstenir, l'utilisation du verre de lunette comme source d'image est limitée par la transparence des matrices actives classiques adressant un signal électrique avec des matériaux métalliques. L'utilisation de la photonique pour adresser chacun des pixels avec un signal optique guidée dans des matériaux diélectriques pourrait permettre d'en optimiser la transmission. Dans ce contexte, nos travaux concernent l'étude et la réalisation expérimentale de dispositifs incluant un guide d'onde et un système d'extraction activable. L'objectif est, d'une part, de sélectionner les matériaux et procédés technologiques adaptés pour former des lignes d'adressage photoniques et, d'autre part, d'associer les composants réalisés avec des éléments actifs permettant d'initier ou non l'extraction d'un guide d'onde. Le dispositif doit être transparent dans le visible afin de respecter les contraintes liées au secteur de l'optique ophtalmique. Dans un premier axe de recherche, des réseaux de diffraction micrométriques sont réalisés grâce au développement d'un procédé de photolithographie sur verre avant d'être imprégnés de cristaux liquides via la formation de cellules. La caractérisation, en transmission, des dispositifs formés permet d'étudier la capacité des molécules de cristal liquide à moduler l'intensité de diffraction pour passer d'un état diffractant à un état non diffractant. Une extinction de la diffraction de 90 à 99,9% selon l'épaisseur des structures est finalement mesurée avec l'application d'un champ électrique dans la cellule. La comparaison de ces résultats avec des calculs numériques permet de confirmer l'alignement des molécules à l'intérieur de la structure ainsi que leurs mobilités sous l'effet d'un champ électrique. Ce principe est, dans un second temps, étudié avec des composants photoniques et la réalisation de GMRF (Guided Mode Resonance Filter), association d'un guide d'onde et d'un réseau de diffraction. Des matériaux issus de la chimie sol-gel sont utilisés pour former des guides d'onde planaires et le développement d'un procédé de lithographie par nano-impression nous a permis d'obtenir les structures nanométriques requises. Divers bancs de caractérisation optique sont alors mis en place pour aboutir à plusieurs méthodes de couplage permettant d'obtenir une onde guidée dans le visible. Finalement, nous avons mesuré une modulation de 90% de l'intensité extraite par le GMRF via l'activation des cristaux liquides
Conception, réalisation et caractérisation de micro-miroirs à déflexion localisée appliqués aux télécommunications optiques by Bruno Estibals( Book )

2 editions published in 2002 in French and held by 2 WorldCat member libraries worldwide

La demande d'acroissement des capacités des réseaux de transmission de données a fait naître un besoin en composants tout optique. Le principal objectif de cette thèse a été de mettre au point une nouvelle architecture de micro-miroir et d'en faire l'évaluation de ses performances. Celle-ci était destinée à être implantée dans des multiplexeurs-démultiplexeurs en longueurs d'ondes ou dans des routeurs optiques. Deux approches comparatives ont été menées, une analytique et une par simulation. Elles ont permis la réalisation puis la caractérisation de micro-miroirs qui sont aujourd'hui commercialisables. Pour des raisons de miniaturisation, nous nous sommes intéressé aux alimentations intégrées spécifiques nécessaires à ce type d'application. Après un état de l'art des solutions existantes pour en déduire des solutions compatibles en taille avec notre application, nous présentons notre contribution à l'avancement des travaux permettant l'obtention d'éléments passifs de stockage
Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations by Céline Casenave( )

1 edition published in 2011 in English and held by 2 WorldCat member libraries worldwide

Conception et modélisation d'un micro-actionneur à base d'élastomère diélectrique by Sofiane Soulimane( )

1 edition published in 2011 in French and held by 1 WorldCat member library worldwide

Polymer materials have been proposed to be good candidates for the development of new actuators. Due to their tunable mechanical and electrical properties, they can be used as electro-active devices. In this manuscript, we focus on dielectric elastomers based actuators, and word toward establishing innovative and alternative integration/miniaturization processes inspired from microelectronics and MEMS technology. Dielectric elastomer actuators are made of an elastomer dielectric layer sandwiched between two conductive electrodes. Upon voltage application attraction forces between the electrodes generates a mechanical displacement correlated with the elastomer Young modulus and permittivity. After a complete review of polymer materials as electro-active actuators, we propose to use the polydimethylesiloxane (PDMS) due to its high elasticity and its permittivity made adjustable by addition of ceramic nanoparticles. A original process for structuring PDMS layers is developed to overcomes the technological challenges encountered during the integration of such materials in a micro-actuator. In addition, several method of characterization allowed us to better understand the physicochemical mechanisms involved at different technological steps for both the material alone or mixed with Titanate of Baryum nanoparticles. We also measured the permittivity and the elasticity modulus of these materials at the end of the manufacturing process thereby verifying the concervation and the enhancement of the initial properties that set our choice. In parallel the response of our actuator is analyzed quantitatively by implementing a finite element model with the Comsol software, and by modeling the elastomer response with hyper elastic models. We show excellent correlation between the model and experimental deformations. Moreover, we determine that the thinness, hence the deformability, of the upper electrode guaranties high performances to the manufactured micro-actuator, and we conduct preliminary tests with a compliant electrode obtained with the PEDOT-PSS conductive polymer
Design and integration of photovoltaic switching conversion chains : Novembre 2001 by Bruno Estibals( Book )

1 edition published in 2001 in English and held by 1 WorldCat member library worldwide

Conception et réalisation de références de tensions alternatives à base de MEMS by François Blard( )

1 edition published in 2012 in French and held by 1 WorldCat member library worldwide

Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to the electromechanical coupling in MEMS, it is possible to make secondary DC and AC voltage references with values from a few volts to several hundred volts with relative stabilities of about 10-7. These standards could constitute an alternative to current Zener references in the case of DC voltage and a first in AC metrology field. This PhD work was dedicated to the development and manufacturing of several generations of MEMS structures with variable electrical capacitance in which we exploit the pull-in phenomenon to build AC voltage references. The design of the samples based on specific architectures characterized by different modes of motion of the movable electrode is achieved through ConventorWare modeling. Both MEMS structures having vertical displacement of the movable membrane and combs-drive design for in-plane motion were considered. These structures have been fabricated with an industrial MPW (Multi Project Wafer) process technology, based on an SOI (Silicon On Insulator) surface micromachining process. However, a dedicated process technology has been developed to meet the specific requirements of our applications. AC voltage references having pull-in voltages ranging from 2 V to 100 V were developed with mechanical resonant frequencies of only a few kilohertz. This makes it possible to use the AC voltage references over a wide frequency range from a few tens of kilohertz to a few megahertz. We have also developed readout electronics specifically designed to match the MEMS characteristics and where the temperature of the samples is controlled. The voltage stability of MEMS was measured over 150 hours and the relative deviation from the mean was found less than one part in 106 at 50 kHz and 100 kHz. Results at several hundred of kHz are also very promising. The temperature dependence is ten times smaller than previously reported, which allow to use less sophisticated thermal stabilization platforms
Étude et conception de microstructures complexes pour la réalisation de systèmes optiques à destination de la correction ophtalmique by Rémy Bossuyt( )

1 edition published in 2014 in French and held by 1 WorldCat member library worldwide

In this thesis the design and implementation of a pixellised transparent structure for which diffraction and diffusion are imperceptible have been studied and the checkerboard double stacked structure was the most appropriate. A study of lithography techniques for large surfaces is proposed. The object is achieved with a sol-gel, combining an organic and an inorganic phase, which have been modified to be sensitive, of a negative-type and transparent in the visible. The resin is studied in terms of its performance under the specific characteristics of each level (alternating checkered tanks and plots). It sets the gamma of the resin and the optimum parameters of insolation. A new method for determining the gamma tailored to negative resins is proposed. The realization of the multi-level structure by photolithography and lamination has been operated. It allows the separation of different levels due to the deposition of a layer of resin. The pixels of the lower level are sealed in one operation. The dimensional characterizations of objects made during the development process were investigated by SEM and mechanical profilometer. A laser bench which calculates the diffraction of structures has been implemented. The optical characterizations performed with the Haze Gard or DHM have yielded a phase image transmission. This step shows that a compromise between the level of diffraction and diffusion level must be found for the needs of ophthalmic optics
Conception et réalisation de micro-capteurs de pression pour l'instrumentation d'interface à retour d'effort by Sébastien Nazeer( )

1 edition published in 2012 in French and held by 1 WorldCat member library worldwide

This PhD work presents the design and realization of a 3D flexible force sensor that can be integrated in surgical gloves or tools to qualify and quantify the grip forces including normal and shear stress. A state of the art first presents the suitable technologies for this application. Then, the choice is focused on the design and dimensioning, using Hooke's law, of a capacitive tri-axis sensor of 8 x 8 x 3 cells/cm² matrix from a flexible dielectric of low Young's modulus around 1 MPa. Designed cells have a nearby nominal capacitance of 0.5 pF. A variation of 30% is expected at maximum force range of 100 N/cm². The aimed dynamic is 1 to 1000. It corresponds to a resolution of 0.15 fF or 100 mN/cm². The flexible sensor fabrication is tackled by taking into account the characterization of support materials, notably the Kapton, in a stream of microfabrication. Metallization and adhesion of electrodes on PDMS problems lead to the development of a process based on film transfer technology adapted to electrodes buried in PDMS. On the basis of ANSYS simulations, the operating physical principle is validated. They are confirmed by static and in charge electrical measurements of the tactile sensor for forces ranging from 10 mN to 20 N
Etude de matrices de filtres Fabry Pérot accordables en technologie MOEMS intégré 3D : Application à l'imagerie multispectrale by Hervé Bertin( )

1 edition published in 2013 in French and held by 1 WorldCat member library worldwide

Multispectral imaging is used to improve target detection and identification in monitoring applications. It consists in analyzing images of the same scene simultaneously recorded in several spectral bands owing to a filtering. This thesis investigates the possibility to realize, an array of four 3D integrated Fabry-Perot (FP) filters that are tunable in the visible-near infrared range by electrostatic actuation. The fixed mirrors of the FP filters are ZnS/YF₃ multilayers deposited on a borosilicate wafer, and the movable mirrors are PECVD SiNH/SiOH multilayer membranes clamped in a very compact movable structure micromachined in a Si wafer. A 3rd glass wafer is used for filters packaging. Optical performances of the FP filters have been optimized by taking into account the asymmetry and the reflection phase shift of the mirrors and the mobile structure has been modeled by finite elements analysis notably to minimize its deformation during actuation. The critical steps of the movable mirrors fabrication process in Si or SOI technology have been developed : i) the fabrication and the release by DRIE and XeF₂ etching of 8 or 12 layers membranes with a residual stress tunable by annealing and a reflectance close to 50% in broad wavelength range (570-900nm), ii) the control with temporary patterns of the simultaneous deep etching of patterns with different widths and depths, and iv) various patterning techniques on highly structured surfaces based on shadow masks (with mechanical alignment) or laminated photosensitive dry films. These results open the way towards the full realization of an array of 3D integrated FP filters
 
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Audience level: 0.94 (from 0.89 for Simulation ... to 0.99 for Lithograph ...)

Languages
French (25)

English (3)