WorldCat Identities

Blard, François (1984-....).

Overview
Works: 4 works in 5 publications in 2 languages and 8 library holdings
Roles: Author
Publication Timeline
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Most widely held works by François Blard
Conception et réalisation de références de tensions alternatives à base de MEMS by François Blard( Book )

2 editions published in 2011 in French and held by 2 WorldCat member libraries worldwide

Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to the electromechanical coupling in MEMS, it is possible to make secondary DC and AC voltage references with values from a few volts to several hundred volts with relative stabilities of about 10-7. These standards could constitute an alternative to current Zener references in the case of DC voltage and a first in AC metrology field. This PhD work was dedicated to the development and manufacturing of several generations of MEMS structures with variable electrical capacitance in which we exploit the pull-in phenomenon to build AC voltage references. The design of the samples based on specific architectures characterized by different modes of motion of the movable electrode is achieved through ConventorWare modeling. Both MEMS structures having vertical displacement of the movable membrane and combs-drive design for in-plane motion were considered. These structures have been fabricated with an industrial MPW (Multi Project Wafer) process technology, based on an SOI (Silicon On Insulator) surface micromachining process. However, a dedicated process technology has been developed to meet the specific requirements of our applications. AC voltage references having pull-in voltages ranging from 2 V to 100 V were developed with mechanical resonant frequencies of only a few kilohertz. This makes it possible to use the AC voltage references over a wide frequency range from a few tens of kilohertz to a few megahertz. We have also developed readout electronics specifically designed to match the MEMS characteristics and where the temperature of the samples is controlled. The voltage stability of MEMS was measured over 150 hours and the relative deviation from the mean was found less than one part in 106 at 50 kHz and 100 kHz. Results at several hundred of kHz are also very promising. The temperature dependence is ten times smaller than previously reported, which allow to use less sophisticated thermal stabilization platforms
Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations by Céline Casenave( )

1 edition published in 2011 in English and held by 2 WorldCat member libraries worldwide

Conception et réalisation de références de tensions alternatives à base de MEMS by François Blard( )

1 edition published in 2012 in French and held by 1 WorldCat member library worldwide

Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to the electromechanical coupling in MEMS, it is possible to make secondary DC and AC voltage references with values from a few volts to several hundred volts with relative stabilities of about 10-7. These standards could constitute an alternative to current Zener references in the case of DC voltage and a first in AC metrology field. This PhD work was dedicated to the development and manufacturing of several generations of MEMS structures with variable electrical capacitance in which we exploit the pull-in phenomenon to build AC voltage references. The design of the samples based on specific architectures characterized by different modes of motion of the movable electrode is achieved through ConventorWare modeling. Both MEMS structures having vertical displacement of the movable membrane and combs-drive design for in-plane motion were considered. These structures have been fabricated with an industrial MPW (Multi Project Wafer) process technology, based on an SOI (Silicon On Insulator) surface micromachining process. However, a dedicated process technology has been developed to meet the specific requirements of our applications. AC voltage references having pull-in voltages ranging from 2 V to 100 V were developed with mechanical resonant frequencies of only a few kilohertz. This makes it possible to use the AC voltage references over a wide frequency range from a few tens of kilohertz to a few megahertz. We have also developed readout electronics specifically designed to match the MEMS characteristics and where the temperature of the samples is controlled. The voltage stability of MEMS was measured over 150 hours and the relative deviation from the mean was found less than one part in 106 at 50 kHz and 100 kHz. Results at several hundred of kHz are also very promising. The temperature dependence is ten times smaller than previously reported, which allow to use less sophisticated thermal stabilization platforms
 
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Conception et réalisation de références de tensions a base de MEMS Les MEMS au service de la métrologie : référence de tension alternative pour l'instrumentation et les systèmes embarqués
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