Scanning Microscopy for Nanotechnology : Techniques and Applications
This book presents scanning electron microscopy (SEM) fundamentals and applications for nanotechnology. It includes integrated fabrication techniques using the SEM, such as e-beam and FIB, and it covers in-situ nanomanipulation of materials. The book will appeal to nanomaterials researchers, and to SEM development specialists.
eBook, English, 2007
Springer-Verlag New York, New York, NY, 2007